发明名称 |
Microelectronic fabrication tool loading method providing enhanced microelectronic fabrication tool operating efficiency |
摘要 |
Within a method for operating a fabrication tool which requires transfer of a series substrates from a storage carrier to a process carrier when fabricating the series of substrates within the process carrier within the fabrication tool, a specific series of substrates is transferred from a storage carrier to a process carrier (and/or the reverse) simultaneously with fabricating a separate series of substrates within a process carrier within the fabrication tool. By employing the method, the fabrication tool may be operated more efficiently.
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申请公布号 |
US2002154988(A1) |
申请公布日期 |
2002.10.24 |
申请号 |
US20010837074 |
申请日期 |
2001.04.18 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHEN YIAU-HWEUI;CHIU KERRY;CHEN RAYMOND;HUANG LARRY |
分类号 |
H01L21/00;H01L21/677;(IPC1-7):B65B69/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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