| 发明名称 |
MAGNETIC FIELD FURNACE AND A METHOD OF USING THE SAME TO MANUFACTURE SEMICONDUCTOR SUBSTRATES |
| 摘要 |
An apparatus and method is provided for manufacturing a semiconductor substrate such as web crystals. The apparatus includes a chamber.and a growth hardware assembly housed within the chamber.A magnetic field system produces a vertical magnetic field within the chamber. |
| 申请公布号 |
WO02059399(A3) |
申请公布日期 |
2002.10.24 |
| 申请号 |
WO2001US50541 |
申请日期 |
2001.12.28 |
| 申请人 |
EBARA SOLAR, INC. |
发明人 |
GLAVISH, HILTON, F.;ISOZAKI, HIDEYUKI;MAISHIGI. KEIJI;FUJITA, KENTARO |
| 分类号 |
C30B29/06;C30B15/00;C30B15/30;C30B29/02;C30B29/64;C30B30/04 |
主分类号 |
C30B29/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
