Thickness measuring method for thin metal layers deposited on a substrate involves cutting calotte in layer-substrate and analyzing using high resolution color CCD row-matrix using artificial intelligence algorithms

摘要

Method has following steps: (a) a calotte is cut in the surface of the layer-substrate union; (b) a high frequency acoustic signal is used during cutting to detect the layer-substrate interface; (c) the resulting calotte ring is analyzed using a high resolution color CCD row-matrix using artificial intelligence algorithms; (d) a 3-D calotte geometry is determined using an optical 3-D measurement technique and layer thickness is determined. An Independent claim is also included for an arrangement for implementation of the inventive method.