Vacuum line for connecting turbomolecular vacuum pump with e.g. analysis apparatus comprises flexible hose section fitted with actively controlled axial magnetic bearing which acts as vibration damper

摘要

The vacuum line for connecting a turbomolecular vacuum pump (12) with e.g. an analysis apparatus or electron microscope (14) comprises a flexible hose section (22). This is fitted with an actively controlled axial magnetic bearing (16) which acts as a vibration damper.