发明名称 Ferroelectric memory element and electronic apparatus
摘要 A ferroelectric memory element and an electronic apparatus provided with this ferroelectric memory element are provided with a thin film recording layer of less than 50 nm film thickness having a high polarization moment and a high Curie temperature, wherein a recording layer of BaTiO3 is fabricated so as to be oriented in a pseudo-cubic system <111> direction in a trigonal crystal structure, and in order to increase the polarization moment and Curie temperature, the unit cell in BaTiO3 film is elongated more than 2% in the pseudo-cubic system <111> direction compared with the unit cell in a bulk material of BaTiO3, wherein in order to produce lattice strain in the crystal structure of the recording layer 3, the recording layer is grown epitaxially on the electrode layer 2 that serves as the base layer, the ferroelectric memory element being provided with the recording layer, and the electronic apparatus being provided with the ferroelectric memory element.
申请公布号 US2002154532(A1) 申请公布日期 2002.10.24
申请号 US20020103681 申请日期 2002.03.21
申请人 MIYAZAWA HIROMU;HIGUCHI TAKAMITSU;IWASHITA SETSUYA 发明人 MIYAZAWA HIROMU;HIGUCHI TAKAMITSU;IWASHITA SETSUYA
分类号 H01L21/8246;H01L27/105;H01L27/115;(IPC1-7):G11C11/22 主分类号 H01L21/8246
代理机构 代理人
主权项
地址