发明名称 |
ANTI-REFLECTIVE COATING COMPOSITION WITH IMPROVED SPIN BOWL COMPATIBILITY |
摘要 |
<p>Anti-reflective compositions and methods of using those compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In one embodiment, the compositions comprise less than about 0.3% by weight of a strong acid. In another embodiment, the weight ratio of strong acid to weak acid in the composition is from about 0:100 to about 25:75. Examples of preferred weak acid compounds include phenolic compounds (e.g., Bisphenol S, Bisphenos A, alpha -cyano-4-hydroxycinnacmic acid), carboxylic acids (e.g., acetic acid), phosphoric acid, and cyano compounds. The polymer and other ingredients are preferably physically mixed in a solvent system. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature). Figure 1 is a scanning electron microscope (SEM) photgraph depicting an anti-reflective coating composition according to the invention deposited on silicon wafers.</p> |
申请公布号 |
WO02083415(A1) |
申请公布日期 |
2002.10.24 |
申请号 |
WO2002US12067 |
申请日期 |
2002.04.15 |
申请人 |
BREWER SCIENCE, INC. |
发明人 |
SHAO, XIE;MEADOR, JIM, D.;BHAVE, MANDAR;KRISHNAMURTHY, VANDANA;NOWAK, KELLY, A.;FOWLER, MICHELLE;DESHPANDE, SHREERAM, V. |
分类号 |
G03F7/11;B32B7/02;C08J3/24;C09D5/00;C09D7/12;C09D105/00;C09D133/00;C09D161/20;C09D163/00;C09D167/00;C09D171/00;C09D179/08;C09D201/00;G03F7/004;G03F7/09;H01L21/027;(IPC1-7):B32B27/36;G03C1/492 |
主分类号 |
G03F7/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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