发明名称 Semiconductor device with process monitor circuit and test method thereof
摘要 The invention provides a semiconductor device capable of appropriately debugging any fluctuation in element characteristic even when the element characteristic fluctuates exceeding a value estimated at the designing stage. This semiconductor device includes a process monitor circuit that monitors any fluctuation in process and outputs a monitor signal M representing a result of monitoring, in addition to circuit blocks that perform respectively required functions. And a timing control circuit that controls timing of an input signal inputted to a predetermined circuit element forming the circuit blocks based on the monitor signal M from the process monitor circuit is provided in the circuit blocks.
申请公布号 US2002153525(A1) 申请公布日期 2002.10.24
申请号 US20020108265 申请日期 2002.03.28
申请人 SHIBAYAMA MARI;FUJIWARA YOSHINORI;NAGURA YOSHIHIRO 发明人 SHIBAYAMA MARI;FUJIWARA YOSHINORI;NAGURA YOSHIHIRO
分类号 G01R31/28;G11C11/401;G11C29/12;H01L21/66;H01L21/822;H01L27/04;H03K5/00;(IPC1-7):H01L23/58 主分类号 G01R31/28
代理机构 代理人
主权项
地址