发明名称 |
Semiconductor device with process monitor circuit and test method thereof |
摘要 |
The invention provides a semiconductor device capable of appropriately debugging any fluctuation in element characteristic even when the element characteristic fluctuates exceeding a value estimated at the designing stage. This semiconductor device includes a process monitor circuit that monitors any fluctuation in process and outputs a monitor signal M representing a result of monitoring, in addition to circuit blocks that perform respectively required functions. And a timing control circuit that controls timing of an input signal inputted to a predetermined circuit element forming the circuit blocks based on the monitor signal M from the process monitor circuit is provided in the circuit blocks.
|
申请公布号 |
US2002153525(A1) |
申请公布日期 |
2002.10.24 |
申请号 |
US20020108265 |
申请日期 |
2002.03.28 |
申请人 |
SHIBAYAMA MARI;FUJIWARA YOSHINORI;NAGURA YOSHIHIRO |
发明人 |
SHIBAYAMA MARI;FUJIWARA YOSHINORI;NAGURA YOSHIHIRO |
分类号 |
G01R31/28;G11C11/401;G11C29/12;H01L21/66;H01L21/822;H01L27/04;H03K5/00;(IPC1-7):H01L23/58 |
主分类号 |
G01R31/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|