发明名称 Method of forming a capacitor
摘要 A conductive structure, including an adhesion layer and a conductor in contact with the adhesion layer and having a thickness of less than six hundred Angstroms. The present invention may be used to form a capacitor, including an adhesion layer, a first conductor in contact with the adhesion layer and having a thickness of less than six hundred Angstroms, a second conductor, and a dielectric between the first and second conductors. The present invention is also directed towards structures wherein iridium or rhodium may be used in place of the combination of the adhesion layer and conductor.
申请公布号 US2002154468(A1) 申请公布日期 2002.10.24
申请号 US20020157376 申请日期 2002.05.29
申请人 发明人 MARSH EUGENE P.
分类号 H01L21/02;(IPC1-7):H01G4/228 主分类号 H01L21/02
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