| 摘要 |
Positions of reticle and stage fiducial marks (16, 15) are measured from image signals that are output by a camera (9) that simultaneously receives reflected light from the reticle fiducial mark (16) and reflected light from the stage fiducial mark (15). An image, which is obtained from an image signal representing the reticle fiducial mark (16), is stored in an image memory (11a) in such a manner that lightness of the image is increased to a predetermined lightness, and the reticle fiducial mark (16) and stage fiducial mark (15) are measured from image signals representing respective ones of the reticle fiducial mark (16) and stage fiducial mark (15).
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