Monolithically integrated high-voltage amplifier for capacitive actuators, has CMOS input amplifier, and layer for dielectrically insulating DMOS transistors in output stage from each other

摘要

The amplifier includes an input amplifier made using CMOS technology and an output stage comprising an inverter stage and a source-follower stage having respective cascaded transistors made in DMOS technology. At least one layer is provided for dielectrically insulating the DMOS transistors from each other.