Ink jet recording head and fabrication method thereof

摘要

In an ink jet recording head having a crystalline substrate in which at least one nozzle and at least one ink chamber formed in the crystalline substrate, a gap is provided in a connecting portion between the nozzle and the ink chamber below an opening portion of the nozzle such that a variation of the ink jetting function due to an axial deviation between the nozzle and the ink chamber is restricted by absorbing the axial deviation by the gap. The gap is formed such that extension lines of wall surfaces of the ink chamber formed by etching are positioned inside the gap.