| 摘要 |
A laser machining device according to the invention is provided with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an Ftheta lens, and a sub-deflecting means arranged in an optical path between the laser oscillator and the main deflecting galvanometer mirror. A means for splitting a laser beam is provided, and the sub-deflecting means is inserted into the optical path of one of the split laser beams. At the same time, both the split laser beams are incident from the same main deflecting galvannometer mirror to the Ftheta lens, and a numerical aperture in the optical system constituted by the main deflecting galvannometer mirror, the Ftheta lens, and an object is set to be not more than 0.08. |
