| 摘要 |
PROBLEM TO BE SOLVED: To develop a novel vibration isolation pedestal suitable for the use in a clean room and causing no dust. SOLUTION: This vibration isolation pedestal A1 for the clean room arranged between a load holding face 20 and a load 21 to shut off the transmission of vibration between the load holding face 20 and the load 21 consists of a pedestal body 1 installed on the load holding face 20, a load holding pedestal 2 holding the load 21, and a vibration isolation member 3 arranged between the pedestal body 1 and the load holding pedestal 2. The pedestal body 1 and the load holding pedestal 2 are constituted by frame structural bodies of aluminum structural members whose surfaces are treated by anodic oxide coating. The vibration isolation member 3 consists of a spring 4 made of stainless steel whose surface is finished into a mirror face and spring seats 5, 6 fitted into both ends of the spring 4, attached to the pedestal body 1 and the load holding pedestal 2, respectively, and constituted by resin discharging no out gas at normal temperature.
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