| 摘要 |
PROBLEM TO BE SOLVED: To provide a general-purpose LSI inspection device that can reduce cost and is small by reducing the number of RAMs built in the LSI inspection device and the number of words. SOLUTION: The LSI inspection device 101 comprises a signal saving circuit 104 and a test bench circuit 103 comprising an FPGA. The test bench circuit 103, in which a built-in logic circuit has a specific circuit configuration adapted to an inspected device 100, comprises transmitting and receiving circuits 111a to 111c for input/output signals 200 of the inspected device, and an inspection signal generating circuit 112, to thereby generate the input/output signals 200 of the inspected device. The signal saving circuit 104 comprises receiving circuits 111c for the input/output signals 200 of the inspected device 100, and a saved signal selecting circuit 115 for selectively writing received data 237 supplied from the receiving circuits 111c into a signal saving RAM 110, to thereby save the input/output signals 200 of the inspected device 100.
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