| 摘要 |
PROBLEM TO BE SOLVED: To provide a size measurement device and a size measurement method with satisfactory size measuring accuracy, and to provided an inspection device for a electronic component using it. SOLUTION: This size measurement device has an image fetching part 1 fetching an inspection target area image, including an image of a target object of n×m pixels (n and m are positive integers), converting the area image into image data, and outputting the image data; an image memory part 2 for storing the image data; a reference template memory part 3 for storing reference template data; a pattern matching part 4 for calculating a correlation profile from the reference template data and respective inspection small area different from each other that are portions of the image data by comparison, based on normalized correlation pattern matching; and a calculation part 5 for calculating size of the target object by respective end points of the target object calculated by the correlation profile. |
