SIGNAL DETECTING DEVICE BY SCANNING PROBE, PROBE MICROSCOPE BY THE DEVICE, SIGNAL DETECTING METHOD BY SCANNING PROBE AND OBSERVING METHOD FOR OBSERVING SAMPLE SURFACE USING THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a signal detecting method by a scanning probe, a probe microscope by the device, a signal detecting method by the scanning probe, and an observing method for observing a sample surface using the method capable of simplifying adjustment work in signal detection and easily coping with dispersion of resonance frequencies between probes. SOLUTION: In the signal detecting device or method by a non-contact scanning probe, a means of detecting a signal of a shift amount of a resonance frequency of a probe converts the detected signal of the shift amount of the resonance frequency of the probe into a low band side signal without changing the shift amount. It has a composition having a frequency changing circuit raising a signal ratio of the shift amount of the resonance frequency of the probe, and a frequency/voltage converting circuit raising strength of the raised frequency shift amount of the signal ratio and converting it into voltage.