PLASMA TREATMENT EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide plasma treatment equipment with which a high-quality treatment can be carried out at a high speed. SOLUTION: This plasma treatment equipment has a cathode 2, a high-frequency power source 5 connected thereto, a magnetron magnetic field generating means (magnet 20) near the cathode 2 and means (coil 21) of decreasing a cathode sheath voltage VS.