| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized power saving type gas sensor capable of simply joining a lead wire while imparting durability to the lead wire connection part of a heater film. SOLUTION: The gas sensor has constitution such that a heater thin film 14, an insulating thin film 15 and a gas sensitive film 16 are successively laminated on an insulating heat-resistant substrate 13. The lead wire joining parts 20 and 21 for supplying voltage and a current provided on both end parts of the heater thin film 14 are constituted of laminated films consisting of joining auxiliary thin films 22a and 22b comprising at least one kind of a material selected from alumina, titanium, zirconium and copper having adhesion and platinum joining thin films 23a and 23b laminated on the joining auxiliary thin films 22a and 22b. Since the platinum wires joined to the platinum joining thin films 23a and 23b are not easily detached, they can be simply joined and the small-sized power saving type gas sensor of which the temperature can rise to an operation temperature in a short time can be realized. |
