| 摘要 |
PROBLEM TO BE SOLVED: To lower a sneaking drive signal appearing as noise in a detection signal in the case of a vibration-type angular speed sensor. SOLUTION: This angular speed sensor has a weight part 30 formed on a semiconductor substrate 12, so as to be vibratable in first and second directions normal to each other and detects an angular velocity by a change in capacitance, caused by the detection vibration of the weight part 30 in the second direction generated, when angular speed is imposed thereon, while the weight part 30 is driven to vibrate in the first direction, where a detection electrode comprises four divisional electrode parts 50a to 50d. When the detection vibration takes place, a difference is found between signals Va and Vb from the pair of adjoining electrode parts 50a and 50b, while a difference is found between signals Vc and Vd from the other pair of adjoining electrode parts 50c and 50d, then the difference is taken between differential signals Vab and Vcd from the two pairs, and used as a detection signal Vout. |
