发明名称 |
Non-volatile semiconductor memory device and manufacturing method thereof |
摘要 |
<p>Memory cell gates are formed on the main surface of a semiconductor substrate (1) via a gate isolation film (5). Source regions (3) and drain regions (4) are formed on both sides of the memory cell gates (2). The source regions (3) have p- impurity regions (3a) and n<+> impurity regions (3b) while the drain regions (4) have p- impurity regions (4a) and n<+> impurity regions (4b). And the concentration of the p- impurity regions (3a) is made higher than the concentration of the p- impurity regions (4a) while the concentration of the n<+> impurity regions (3b) is made higher than the concentration of the n<+> impurity regions (4b). <IMAGE></p> |
申请公布号 |
EP1251564(A2) |
申请公布日期 |
2002.10.23 |
申请号 |
EP20020013734 |
申请日期 |
2001.05.09 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
FUKUMOTO, ATSUSHI;SHIMIZU, SATOSHI;OHNAKADO, TAKAHIRO |
分类号 |
H01L21/8239;H01L21/336;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115;H01L21/824 |
主分类号 |
H01L21/8239 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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