发明名称 VIBRATION ISOLATION MECHANISM AND RADIATION BEAM DEVICE
摘要 PROBLEM TO BE SOLVED: To easily execute the damping control of an object to be protected according to the vibration characteristic of the floor to set the object on. SOLUTION: Vibration isolation mounts 22A, 22B, 22C and 22D are mounted at four corners between a base plate 5 and a rack. The vibration isolation mechanisms with dampers 24A and 24B are disposed at left and right symmetrical positions relative to a shaft 23 where the center of gravity of a microscope body 21 is present. The vibration isolation mechanism is in contact with the base plate 5, with an upper spring holder 25 on which a screw is cut and with the rack 4 on the setting floor, and has a lower spring holder 26 to which an oil container 28 storing a silicone oil 27 is attached. A rod body 30 whose length in the axial direction is adjustable is attached to the upper spring holder 25. The rod body 30 consists of a rod 31 with a screw cut on the outer surface, a pipe 32 with a screw engaged with the rod 31 is cut on the inner surface, and fixing nuts 34, 34. The length of the rod body 30 in the axial direction is determined by adjusting the screwing state of the pipe 32 into the rod 31.
申请公布号 JP2002310229(A) 申请公布日期 2002.10.23
申请号 JP20010111324 申请日期 2001.04.10
申请人 JEOL LTD 发明人 KAMIMURA EISUKE
分类号 F16F15/023;H01J37/16;H01L21/027;(IPC1-7):F16F15/023 主分类号 F16F15/023
代理机构 代理人
主权项
地址