发明名称 OPTICAL SCANNER AND METHOD FOR MANUFACTURING IT
摘要 PROBLEM TO BE SOLVED: To realize miniaturization, a light weight and low power consumption. SOLUTION: This optical scanner is provided with a plate 11 formed of monocrystal silicon material 23, a resonator 13 provided within a window 12 pierced at the plate and formed of the same material as the plate, a pair of beams 14a and 14b which are integrally formed of the same material as the plate and the resonator and support the resonator at the mutually opposing window frames 12a and 12b of the window, a magnetic body 15 provided at the resonator, magnetic field applying means 16 and 17 for applying the AC magnetic field of a frequency corresponding to the resonance frequency f0 of the resonator to the magnetic body, a mirror surface 18 formed on the surface of the resonator and a light source 18 for irradiating the surface 18 with light 20.
申请公布号 JP2002311372(A) 申请公布日期 2002.10.23
申请号 JP20010117351 申请日期 2001.04.16
申请人 ANRITSU CORP 发明人 TAKAHASHI YOSHIFUMI;NAKAMURA KENICHI;KOTADO SETSUO;FUJITA HIROYUKI
分类号 G02B26/10;(IPC1-7):G02B26/10 主分类号 G02B26/10
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