| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-dimensional drive actuator including a first torsion bar and a second torsion bar having resonance frequency largely different each other. SOLUTION: An actuator 100 is provided with a movable plate 102, a movable inner frame 104 surrounding the actuator 102, the first torsion bar 112, 114 connecting the movable plate 102 to the movable inner frame 104, a fixed outer frame 106 surrounding the movable inner frame 104, and a leaf spring structure body including the second torsion bar 116, 118 connecting the movable inner frame 104 and the fixed outer frame 106. The first torsion bar 112, 114 and the second torsion bar 116, 118 are composed of different materials. The actuator 100 includes a drive coil 122 wound around the movable inner frame 104, a pair of first permanent magnets 132, 134 generating static magnetic field in parallel with a first shaft, and a pair of second permanent magnets 136, 138 in parallel with the first shaft. |
