METHOD AND APPARATUS FOR TREATING CIRCUIT MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a method for treating circuit members generating no toxic gas including dioxins. SOLUTION: This method for treating circuit members comprises reaction of multiplayer substrates 9 having a polymeric material with supercritical water made by bridging water 3 to 450 deg.C and a pressure of 30 MPa. Since this method also includes the polymer decomposition step of decomposing the polymeric material by the supercritical water to generate H2 or CH4 , no toxic gas such as dioxins generates owning to decompositing the polymeric material.