| 摘要 |
<p>PROBLEM TO BE SOLVED: To find desired measuring positions and analyzing positions easily on samples. SOLUTION: The apparatus for analyzing samples by measuring or analyzing the samples is constituted of a sample stage 4 for movement on a plane, and a position calculating means 3 which determines the analyzing positions based on transmission X-ray images of the samples to be analyzed to obtain position data of the analyzing positions. The sample stage 4 is moved based on the position data from the position calculating means 3 to set the analyzing positions on the samples. Thus, the desired measuring positions and analyzing positions can be found easily by observing the transmission X-ray images of the samples, thereby shortening analyzing time.</p> |
