| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generator which has such an advantage as can improve the availability factor of it by shortening the time for replacing optical elements or can reduce the time and costs required for the maintenance of the generator and an exposure device using it. SOLUTION: Four or six multilayer film parabolic mirrors 11 are mounted on a disc 10 in the X-ray generator and are encased in a protective container 12. Semiconductor laser and a photodiode are located around the mirrors 11 and detect the positions and inclinations of the mirrors 11. When a signal detecting the drop in the dose of X rays is sent out from an X-ray detector 24 to a judgment section 27 of a controller 25, a command section 26 drives a motor 15 to rotate the disc 11 and locates a new mirror 11-2 in the position where a first mirror 11-1 was located. The maintenance of the whole device is unnecessary until the end of the use of all the mirrors mounted on the disc 10. |
