METHOD AND INSTRUMENT FOR MEASURING LIGHT INTENSITY AND PROJECTION ALIGNER

摘要

PROBLEM TO BE SOLVED: To provide a method of measuring light intensity by which the intensity of light can be measured with high accuracy by improving the linearity of signal output to the intensity and the sensitivity to the intensity by solving the problem that the signal output to the intensity becomes nonlinear and the measurement accuracy of the intensity is low, and to provide a light intensity measuring instrument and a projection aligner. SOLUTION: In the method of measuring light intensity, the linearity of the signal output to the intensity of light from a light source and the sensitivity to the intensity are improved by measuring the intensity by passing the light through a punched plate having a plurality of holes and positioned between a light receiving element and a light source section. Consequently, the measurement accuracy of the method, light intensity measuring instrument, and projection aligner can be improved.