发明名称 CONTACT DEVICE AND CONTACT PROBE PROVIDED WITH THE SAME
摘要 PROBLEM TO BE SOLVED: To enable to be in contact with a measured object, and easily and rapidly respond when contact failure occurs. SOLUTION: A conductive connection part 4a connected to the measured object 2 in a conductive state is included. A contact device C for conducting a contact surface 2a of the measured object and the conductive connection part 4a by abutting on the contact surface 2a of the object of measurement 2 and the conductive connection part 4a respectively is detachably arranged. A plane part 12 which is formed on the contact device C so as to be approximately in parallel to the contact surface 2a and abuts on the conductive connection part 4a is provided.
申请公布号 JP2002311057(A) 申请公布日期 2002.10.23
申请号 JP20010108299 申请日期 2001.04.06
申请人 MITSUBISHI MATERIALS CORP 发明人 MASUDA AKIHIRO;SUGIYAMA TATSUO;MISHIMA TERUSHI
分类号 G01R31/26;G01R1/06;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R31/26
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