PROCESS FOR PREPARING BIS(CYCLOPENTADIENYL)RUTHENIUM DERIVATIVE, BIS(CYCLOPENTADIENYL)RUTHENIUM DERIVATIVE PREPARED THROUGH THE PROCESS AND CHEMICAL VAPOR DEPOSITION PROCESS FOR RUTHENIUM FILM OR RUTHENIUM COMPOUND FILM

摘要

PROBLEM TO BE SOLVED: To provide a process for preparing a bis(cyclopentadienyl)ruthenium derivative comprising only a few steps wherein a highly pure bis(cyclopentadienyl)ruthenium derivative can be prepared. SOLUTION: The process for preparing a bis(cyclopentadienyl)ruthenium derivative comprises a step wherein a bis(cyclopentadienyl)iron derivative (ferrocene derivative) is heated and allowed to react with a ruthenium compound in an inert gas in a sealed vessel. Here, the inert gas is preferably helium, argon or nitrogen, and the heating temperature is preferably from 200 to 350 deg.C.