| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectral measuring device superior in the measuring precision of light of a far ultraviolet, vacuum ultraviolet and soft X ray area. SOLUTION: In the spectral measuring device for measuring the intensity and distribution of the spectral energy of light in which the wavelength area of the light to be measured is 300 nm or less by using an integral sphere 7, a phosphor coat containing inorganic phosphor particles and fluorine resin particles in the whole or a part of the inner face of the integral sphere 7 is provided. The fluorine resin constituting the phosphor coat provided on the inner face of the integral sphere is tetrafluoroethylene resin, its derivative and their copolymer resin.
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