| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing method, polishing tool, and polishing device assuring a good surface accuracy of the surface of an optical element of non- spherical type to be polished as improvement of a conventional technique in which the flexibility of the polishing tool is improper not allowing polishing in good workmanship to result in a low surface accuracy of the optical element. SOLUTION: The polishing tool for the optical element having a polisher 11 to polish the optical element and a supporting tool to support the polisher is structured so that the void between the polisher 11 and supporting tool is filled with an electroviscous fluid 12, and polishing is conducted while a voltage is impressed on the electroviscous fluid 12, and thereby the flexibility of the polishing tool can be made proper according to the polishing process, which allows establishing a good surface accuracy of the surface of the optical element as a workpiece 19.
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