MICRO MIRROR DRIVING DEVICE AND ITS CONTROLLING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a micro mirror driving device capable of increasing a rotation angle by low voltage by controlling the resonance frequency and amplitude of the micro mirror simultaneously. SOLUTION: The device has the micro mirror 110 having at least one group, an elastic body 105 for supporting the mirror 110 rotatably and at least one electrode for rotating the mirror 110 by generating static electricity by mutual operation with the mirror 110. In the case of driving the mirror 110 by using static electricity, an effective area required by the mirror 110, namely the area of a driving part capable of applying static electricity while keeping optical reflection path, is expanded to obtain large driving force and a large rotation angle even by low voltage.