| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device, a polishing method, a program for letting a computer execute polishing, and a recording medium capable of realizing highly precise polishing. SOLUTION: An object 5 to be polished is put on a workpiece table 2, and polishing liquid is sprayed from at least one nozzle 10 to form, polish, and machine a surface of the object 5 to be polished. The nozzle 10 and the object 5 to be polished move relatively, and an angle of the nozzle 10 can be changed.
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