| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotating coating method for efficiently applying a coating liquid onto a wide area of a substrate at a uniform thickness. SOLUTION: The coating liquid is delivered to an approximate center of the surface of the substrate under a first delivery pressure, and after the coating liquid is delivered under the first delivery pressure for a predetermined time, the coating liquid is delivered under a second delivery pressure higher than the first delivery pressure within one minute or less and the delivery is completed within two minutes or less after the delivery is started under the second delivery pressure. Thereafter, the substrate is rotated at a high speed to apply the coating liquid. |
