发明名称 Surface nitriding member
摘要 A nitriding portion made of aluminum nitride as a main ingredient having a high concentration region in which an element mentioned below is existent at a high concentration and a low concentration region in which the element existent at a low concentration is formed on a surface of a substrate made of aluminum, aluminum alloy or aluminum-containing composite material by existing at least one element other than aluminum selected from Group 2A, Group 3A, Group 4A and Group 4B in Periodic Table in a stepwise manner. Thereby, it is possible to form the nitriding portion which shows a high corrosion resistance property with respect to a halogen-based corrosive gas.
申请公布号 US6468366(B1) 申请公布日期 2002.10.22
申请号 US20000568500 申请日期 2000.05.11
申请人 NGK INSULATORS, LTD. 发明人 KATSUDA YUJI;TSUTSUMI TAKETOSHI;MASUDA MASAAKI
分类号 H01L21/302;C01B21/072;C23C8/04;C23C8/24;H01L21/3065;(IPC1-7):C23C8/00 主分类号 H01L21/302
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