发明名称 Semiconductor device and method of fabricating the same
摘要 The purpose of the present invention is to provide a reliable semiconductor device comprising TFTs having a large area integrated circuit with low wiring resistance. One of the features of the present invention is that an LDD region including a region which overlaps with a gate electrode and a region which does not overlap with the gate electrode is provided in one TFT. Another feature of the present invention is that gate electrode comprises a first conductive layer and a second conductive layer and portion of the gate wiring has a clad structure comprising the first conductive layer and the second conductive layer with a low resistance layer interposed therebetween.
申请公布号 US6469317(B1) 申请公布日期 2002.10.22
申请号 US19990464200 申请日期 1999.12.16
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;KOYAMA JUN
分类号 H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L31/036;H01L31/20;H01L29/04;H01L31/037;H01L31/112 主分类号 H01L21/77
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