发明名称 |
Pumping device by non-vaporisable getter and method for using this getter |
摘要 |
The invention discloses a pumping device by non-vaporizable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterized in that it comprises a thin layer of non-vaporizable getter coated on at least almost the whole metal wall surface defining the chamber.
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申请公布号 |
US6468043(B1) |
申请公布日期 |
2002.10.22 |
申请号 |
US19980202668 |
申请日期 |
1998.12.18 |
申请人 |
EUROPEAN ORGANIZATION FOR NUCLEAR RESEARCH |
发明人 |
BENVENUTI CRISTOFORO |
分类号 |
H05H7/00;F04B37/02;H01J7/18;H01J9/18;H01J41/12;H05H13/04;(IPC1-7):F04B37/02;F04F11/00 |
主分类号 |
H05H7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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