发明名称 |
Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication |
摘要 |
A method is provided. for manufacturing, the method including processing a workpiece in a processing step, measuring a parameter characteristic of the processing performed on the workpiece in the processing step, and forming an output signal corresponding to the characteristic parameter measured. The method also includes setting a target value for the processing performed in the processing step based on the output signal.
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申请公布号 |
US6470230(B1) |
申请公布日期 |
2002.10.22 |
申请号 |
US20000477464 |
申请日期 |
2000.01.04 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
TOPRAC ANTHONY J.;MILLER MICHAEL L.;SONDERMAN THOMAS |
分类号 |
H01L21/02;G03F7/20;H01L21/66;(IPC1-7):G06F19/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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