发明名称 |
Multiprobe and scanning probe microscope |
摘要 |
A multiprobe device is provided for a scanning probe instrument and has a plurality of individually-selectable probe members for conducting scanning probe operations. The multiprobe has a plurality of cantilever probes supported by a support member. Each of the cantilevers is individually-selectable for use in conducting scanning probe operations, and each has a different resonance frequency from the others. In a preferred embodiment, portions of the respective cantilevers that are brought into contact with a sample to conduct scanning probe operations are arranged in a substantially linear configuration. A given one of the cantilevers is selected by vibrating the multiprobe at the resonance frequency of the given cantilever.
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申请公布号 |
US6469293(B1) |
申请公布日期 |
2002.10.22 |
申请号 |
US20000514096 |
申请日期 |
2000.02.28 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
SHIMIZU NOBUHIRO;TAKAHASHI HIROSHI;SHIRAKAWABE YOSHIHARU;YASUMURO CHIAKI;ARAI TADASHI |
分类号 |
G01B21/30;G01N37/00;G01Q20/04;G01Q60/32;G01Q60/38;G01Q70/06;(IPC1-7):H01J5/16 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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