发明名称 Solid state image sensing device and method of producing the same
摘要 A solid state image sensing device comprises a cell area, located at a semiconductor substrate, including photoelectric conversion portions and charge transfer portions and a peripheral circuit area formed around the cell area located at the semiconductor substrate. The peripheral circuit area includes a first p+-type semiconductor region and an insulating film with a relatively large thickness formed on the first p+-type semiconductor region. The cell area further includes a second p+-type semiconductor region and an insulating film with a relatively small thickness formed on the second p+-type semiconductor region. The majority of the insulating film with the relatively large thickness is formed by means of a CVD process.
申请公布号 US6469329(B1) 申请公布日期 2002.10.22
申请号 US20000587804 申请日期 2000.06.06
申请人 NEC CORPORATION 发明人 HATANO KEISUKE;NAKASHIBA YASUTAKA
分类号 H01L27/14;H01L27/146;(IPC1-7):H01L27/148 主分类号 H01L27/14
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