发明名称 |
Method and apparatus for determining measurement frequency based on hardware age and usage |
摘要 |
A processing line includes a processing tool, a measurement tool, and an automatic process controller. The processing tool is adapted to process articles. The measurement tool is adapted to measure a characteristic of selected articles at a measurement frequency. The automatic process controller is adapted to change the measurement frequency based on a usage characteristic of the processing tool. A method for monitoring a processing tool includes processing a plurality of articles in the processing tool; measuring a characteristic of selected articles at a measurement frequency; and changing the measurement frequency based on a usage characteristic of the processing tool.
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申请公布号 |
US6469518(B1) |
申请公布日期 |
2002.10.22 |
申请号 |
US20000479180 |
申请日期 |
2000.01.07 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
DAVIS BRADLEY M.;EVANS ALLEN L.;CHRISTIAN CRAIG W. |
分类号 |
H01L21/02;H01L21/66;(IPC1-7):G01R27/00;G05B13/02;G06F19/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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