发明名称 |
WIRE BONDING APPARATUS FOR SEMICONDUCTOR PACKAGE AND BALL FORMATION METHOD OF WIRE USING THE SAME |
摘要 |
<p>PURPOSE: A wire bonding apparatus for a semiconductor package and a ball formation method of a wire using the same are provided to easily achieve balls of uniform and small size by forming the ball at the end point of a conductive wire using a laser. CONSTITUTION: The wire bonding apparatus comprises a transducer(13) for transmitting ultrasonic energy, a capillary(14) formed at one end of the transducer for connecting a conductive wire(20) to I/O pads of semiconductor chips and circuit patterns of a substrate, and a ball formation part(15) for forming a ball(21) to one end of the conductive wire(20). The ball formation part(15) further includes a laser output part(15a) for outputting a laser into the one end of the conductive wire(20) and a laser generating part(15b) for applying the laser into the laser output part(15a).</p> |
申请公布号 |
KR20020078930(A) |
申请公布日期 |
2002.10.19 |
申请号 |
KR20010019340 |
申请日期 |
2001.04.11 |
申请人 |
AMKOR TECHNOLOGY KOREA, INC. |
发明人 |
EUN, YEONG HYO;KO, SEOK GU |
分类号 |
H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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