发明名称 METHOD FOR FABRICATING SEMICONDUCTOR PACKAGE
摘要 PURPOSE: A method for fabricating a semiconductor package is provided to adhere correctly a semiconductor chip on a predetermined position of a chip loading region by maintaining an aligning position between the semiconductor chip and the chip loading region. CONSTITUTION: A transfer portion guides a transferring operation and a stopping operation of a member(22). A driving portion transfers and adheres a semiconductor chip(20) to a chip loading region(24) of the member(22). A sense portion senses correctly an aligning position of the semiconductor chip(20) and compensates the error. A camera(12) of a vision system is installed at die bonder equipment(10). The camera(12) is located on an upper side of the semiconductor chip(20) transferred to a pickup tool(14). An X-ray examination system is used as the vision system.
申请公布号 KR20020079209(A) 申请公布日期 2002.10.19
申请号 KR20010019949 申请日期 2001.04.13
申请人 AMKOR TECHNOLOGY KOREA, INC. 发明人 DO, WON CHEOL;KOO, JAE HUN;LEE, SEUNG JU;SHIN, WON DAE
分类号 H01L21/50;(IPC1-7):H01L21/50 主分类号 H01L21/50
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