COMPOSITION OF FETIN BASED SOFT MAGNETIC FILM ALLOY

摘要

PURPOSE: A composition of FeTiN based soft magnetic film alloy is provided to form the composition having a micro grain structure by using a sputtering method without performing an additional thermal process. CONSTITUTION: A composition of FeTiN based soft magnetic film alloy is FexTiyNz where x,y,z are at% and 85<=x<=95, 1<=y<=4, 1<=z<=11(x+y+z=100). The composition of FeTiN based soft magnetic film alloy is formed by adding Cr to the composition of FeTiN based soft magnetic film alloy. The amount of Cr corresponds to 5 and below at% of the total composition of FeTiN based soft magnetic film alloy. The composition of FeTiN based soft magnetic film alloy is formed by using a sputtering method or a physical vapor deposition method. In a deposition of the composition, α-Fe, a nitride of Ti, and a nitride of Cr are formed with grains of nano sizes.