SENSING DEVICE OF OPERATION OF ROBOT CHUCK FOR TRANSPORTING WAFER

摘要

PURPOSE: A sensing device of operation of a robot chuck for transporting wafer is provided to monitor the correct state of the motion of the robot chuck, picking up and transporting wafer to prevent the malfunction. CONSTITUTION: A cam block(32) is installed on the moving axis(30). Two rollers(40,42) are mounted on chuck axes(36,38) located on both sides of a T-type sensor dog(34). Two pairs of sensors(44,44',46,46') operate to sense the either side motion of the sensor dog along its moving direction. The robot chuck is attached to the bottom part of the chuck axis. Each end of rollers is connected to a spring(48) so that it can stretch and contract according to the motion of the cam block.