METHOD OF MANUFACTURING NONLINEAR ELEMENT, METHOD OF MANUFACTURING ELECTRO-OPTIC DEVICE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC APPLIANCE

摘要

PURPOSE: A method of manufacturing a nonlinear element is provided to improve the nonlinearity of a nonlinear element, an electro-optic device, and electronic appliance. CONSTITUTION: An underlying layer(61) is formed on the surface of the element substrate in the underlying layer forming step(a). Then a first metal film(62) having a metal film containing at least Ta is formed in the first metal film forming step(b). Then, in the insulating film(63) forming step(c), the first metal film is annealed under high pressure in an atmosphere containing water vapor to form an insulating film on the first metal film. Then, in the second metal film forming step, a second metal film is formed on the surface of the insulating film to produce a nonlinear element.