发明名称 WAFER STORAGE CONTAINER AND PRODUCTION METHOD THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a wafer storage container and a production method therefor, with which a component can be highly accurately positioned and inserted in the metal die of a simple structure and one part and the remaining parts of a body of container can be formed from different materials. SOLUTION: This container is provided with a main body of container formed, while opening the front, support members 30 for placing wafer provided, while facing each other on both the sides of the internal part of the body of container and a rear retainer installed on the back of the internal part of the body of container for supporting the wafer. Each of support members 30 is composed of a plurality of rack boards 32 vertically aligned at prescribed pitches and a stretchable link bar 33 for linking a plurality of rack boards 32 in the vertical aligning direction separately from the body of container. When forming the body of container, the supporting members 30 are inserted into the metal die for forming the body of container and respective support members 30 and the body of container are integrated.</p>
申请公布号 JP2002305239(A) 申请公布日期 2002.10.18
申请号 JP20010108825 申请日期 2001.04.06
申请人 SHIN ETSU POLYMER CO LTD;SHIN ETSU HANDOTAI CO LTD 发明人 YAJIMA TOSHITSUGU;MIMURA HIROSHI;KAMATA TOSHIYUKI;KUDO HIDEO;MATSUO TAKASHI
分类号 B65D85/00;B65D85/86;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65D85/00
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