ASYMMETRIC TYPE beta-KETOIMINATE LIGAND COMPOUND, METHOD FOR PRODUCING THE SAME AND ORGANOMETALLIC PRECURSOR CONTAINING THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain aβ-ketoiminate ligand having excellent vaporizing characteristics and thermal and chemical stabilities and remarkably improved solubility. SOLUTION: The asymmetric typeβ-ketoiminate ligand compound has the structure represented by formula 4 [wherein, R1 is a 1-8C linear or a 1-8C branched alkyl group; R2 is a 2-9C linear or a 2-9C branched alkyl group in which the number of carbon atoms of R2 is larger than that of R1 ; R' is a 1-8C linear or a 1-8C branched alkylene group or a hydrocarbon group having 1-3 ethylene ether groups or propylene ether groups represented by (CH2 )n O ((n) is 2 or 3); R3 is hydrogen atom or a 1-9C linear or a 1-9C branched alkyl group; and X is oxygen or sulfur atom].