| 摘要 |
PROBLEM TO BE SOLVED: To enhance the strippability of a composition capable of photoimaging. SOLUTION: The photoresist composition contains a polymeric binder, a photoactive component, a photoresist strip enhancer and optionally a cross- linking agent, wherein the photoresist strip enhancer is non-polymerizable with the polymeric binder, optional cross-linking agent or both and has formula (1) wherein each X is independently chlorine, bromide, fluorine or iodine; Z= cyano, aryl, substituted aryl, C(Y)-R<1> , C≡C-R<2> and C(R<3> )=CR<4> R<5> ; Y=oxygen or sulfur; and R=Z, hydrogen, (C1 -C4 )alkyl, (C1 -C4 )alkoxy, substituted (C1 -C4 ) alkyl, substituted (C1 -C4 )alkoxy. |
