| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a stamper for optical disk manufacture by which fine unevenness can be formed by using chemical amplification type photoresist capable of high-density recording and peeling of the stamper from an original disk does not occur even during polishing stamper reverse surface when the stamper for optical disk manufacture is manufactured. SOLUTION: A process of manufacturing the stamper for optical disk manufacture which has fine unevenness has a process of forming the fine unevenness of photoresist by exposing the photoresist applied to the original disk to a pattern corresponding to the fine unevenness and developing it, a process of bonding a 1st conductive layer to the outer peripheral part of the original disk having the fine unevenness formed by electroless plating from the top surface side where the fine unevenness is formed to the reverse surface on the opposite side, a process of bonding and depositing a 2nd conductive layer by physical vapor phase deposition(PVD) on the top surface side of the original disk, and a process of electrolytically plating the 1st and 2nd conductive layers of the original disk by electrifying the 1st and 2nd conductive layers.
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